Product List
Product List
- Out of 57 items,
- item No. 1 to 10
- Semiconductor manufacturing process
We provide high-purity, high-precision products suited to semiconductor device production facilities through production process equipment, in categories including pre-process, post-process, components for chemical liquid supply equipment, components for chemical gas supply equipment, and components for N2 purge. We offer a wide lineup of valves, regulators, and control systems for control of chemical liquids, gases, and vacuum. We also offer everything from single valves to panels combining valves and regulators, under thoroughgoing quality control based on ISO 9001.
Filters
Siloxane/Ozone Remover
- Model No.
- SFX
NEW
This remover is specialized for the adsorption and ozone decomposition of siloxane.
The high removal rate of 99% allo…
- Industry
- Semiconductor manufacturing process (post-process)
- Implementation
- Documents / Download
PDF Catalog
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Pilot operated 3, 4, 5-port solenoid valves
3, 5-port pilot operated valve
- Model No.
- 4GA/BR・M4GA/BR・MN4GA/BR
NEW
[NEW] Supported communication expanded.
3, 5-port valve with improved environmental performance, safety, reliabil…
- Industry
- Assembly
- Air pressure supply
- Purified water production
- Adjustment
- Filtration
- Bag manufacturing (for infusion bags)
- Filling
- Sterilization (autoclave)
- Packaging
- Tableting
- Cultivation
- Sorting
- Sterilizing equipment
- Physicochemical analysis equipment
- Semiconductor manufacturing process (post-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
User's Manual
Software
2D CAD
3D CAD
Manifold Specifications
CKD plus Members Only
Process gas components
Regulator for process gas
- Model No.
- PGM
NEW
CKD's process gas regulators boast industry-leading sealing performance, hysteresis, and repeatability.
Achieves…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Documents / Download
PDF Catalog
2D CAD
3D CAD
CKD plus Members Only
Electro pneumatic regulators
Electro pneumatic regulator
- Model No.
- EVS2
NEW
[NEW] Variation added
30 mm wide compact, lightweight and high performance electro pneumatic regulator.
Ideal for…
- Industry
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Vacuum-related products
Compact vacuum regulator
- Model No.
- VSRVV
NEW
Push-lock compact vacuum regulator.
- Industry
- Conveyance
- Assembly
- Handling
- Inspection
- Implementation
- Semiconductor manufacturing process (post-process)
- Documents / Download
PDF Catalog
3D CAD
CKD plus Members Only
Flow sensors / controllers
Compact Flow Rate Sensor RAPIFLOW®
- Model No.
- FSM3
NEW
【NEW】 Environment-resistant specifications (IP65) added
With just this 1 device, 5 types of gases are compatible: air…
- Industry
- Shield gas
- Semiconductor manufacturing process (post-process)
- N2 purging related products
- Documents / Download
Digital Catalog
PDF Catalog
User's Manual
Software
2D CAD
3D CAD
Technical Data
CKD plus Members Only
Flow sensors / controllers
Compact flow rate controller RAPIFLOW®
- Model No.
- FCM
NEW
It is a device that unitizes flow sensor function, proportional control function and valve function, and controls necess…
- Industry
- Shield gas
- N2 purging related products
- Physicochemical analysis equipment
- Documents / Download
PDF Catalog
User's Manual
Software
2D CAD
3D CAD
CKD plus Members Only
Pilot operated 3, 4, 5-port solenoid valves
PLC-compatible block manifold
- Model No.
- MN3E・MN4E
More compact (39.5 mm high) and high-performance cassette 3, 4-port block manifold is also available.
[Cylinder bore…
- Industry
- Semiconductor manufacturing process (pre-process)
- Components for chemical liquid supply facilities
- Components for chemical gas supply facilities
- N2 purging related products
- Documents / Download
PDF Catalog
User's Manual
Software
2D CAD
3D CAD
Manifold Specifications
CKD plus Members Only
Regulators
Pilot regulator
- Model No.
- PMP
NEW
A regulator designed to stabilize the pressure fluctuation of chemical liquids and pure water supply parts using pilot a…
- Industry
- Semiconductor manufacturing process (pre-process)
- Documents / Download
Digital Catalog
PDF Catalog
User's Manual
2D CAD
3D CAD
CKD plus Members Only
Electro pneumatic regulators
Digital electro pneumatic regulator
- Model No.
- EVD
NEW
Compact, high-function electro pneumatic regulator featuring easily used functions such as pressure and error display fu…
- Industry
- Semiconductor manufacturing process (post-process)
- Special purpose / conveyance
- Documents / Download
PDF Catalog
User's Manual
Software
2D CAD
3D CAD
CKD plus Members Only
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- Industry
- Semiconductor manufacturing process
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